Carbon, oxygen, boron, hydrogen and nitrogen in the LEC growth of SI GaAs: a thermochemical approach

Autor: Korb, J a, Flade, T b, Jurisch, M b, *, Köhler, A b, Reinhold, Th b, Weinert, B b
Zdroj: In Journal of Crystal Growth 1999 198 Part 1:343-348
Databáze: ScienceDirect