Study of effects of varying parameters on the dislocation density in 200 mm SiC bulk growth
| Autor: | Lu, Sheng' ou, Xu, Binjie, Chen, Hongyu, Hang, Wei, Wang, Rong, Yuan, Julong, Pi, Xiaodong, Yang, Deren, Han, Xuefeng |
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| Zdroj: | In Journal of Crystal Growth 1 February 2024 627 |
| Databáze: | ScienceDirect |
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