Strategy for reliable growth of thin GaN Caps on AlGaN HEMT structures

Autor: Hinz, Alexander M., Ghosh, Saptarsi, Fairclough, Simon M., Griffiths, James T., Kappers, Menno J., Oliver, Rachel A., Wallis, David J.
Zdroj: In Journal of Crystal Growth 15 December 2023 624
Databáze: ScienceDirect