Numerical study on the effects of inner crucible window heights on the growth of silicon in a continuous Czochralski process

Autor: Su, Wenjia, Zhang, Zhen, Li, Jiulong, Guan, Zhicheng, Li, Jiaqi, Liu, Junjie
Zdroj: In Journal of Crystal Growth 1 April 2023 607
Databáze: ScienceDirect