Numerical study on the effects of inner crucible window heights on the growth of silicon in a continuous Czochralski process
Autor: | Su, Wenjia, Zhang, Zhen, Li, Jiulong, Guan, Zhicheng, Li, Jiaqi, Liu, Junjie |
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Zdroj: | In Journal of Crystal Growth 1 April 2023 607 |
Databáze: | ScienceDirect |
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