Sn distribution in Ge/GeSn heterostructures formed by sputter epitaxy method

Autor: Tsukamoto, Takahiro, Ikeno, Kento, Hirose, Nobumitsu, Kasamatsu, Akifumi, Matsui, Toshiaki, Suda, Yoshiyuki
Zdroj: In Journal of Crystal Growth 15 February 2023 604
Databáze: ScienceDirect