Metalorganic vapor-phase epitaxy of β-(AlxGa1-x)2O3 on ([formula omitted] 0 1) Ga2O3 substrates

Autor: Zheng, Xueyi a, Zheng, Jun b, c, ⁎, He, Chen b, c, Liu, Xiangquan b, c, Zuo, Yuhua b, c, Cheng, Buwen b, c, Li, Chuanbo a
Zdroj: In Journal of Crystal Growth 1 February 2023 603
Databáze: ScienceDirect