Crystallinity improvement of room-temperature PLD-deposited ZnO thin films on cyclo-olefin polymer substrates subject to surface-pretreatment with vacuum-UV-light irradiation

Autor: Oga, Tomoaki, Kai, Ryoya, Kaneko, Naho, Miyazaki, Hisashi, Kaneko, Satoru, Matsuda, Akifumi, Yoshimoto, Mamoru
Zdroj: In Journal of Crystal Growth 1 February 2023 603
Databáze: ScienceDirect