Crystallinity improvement of room-temperature PLD-deposited ZnO thin films on cyclo-olefin polymer substrates subject to surface-pretreatment with vacuum-UV-light irradiation
Autor: | Oga, Tomoaki, Kai, Ryoya, Kaneko, Naho, Miyazaki, Hisashi, Kaneko, Satoru, Matsuda, Akifumi, Yoshimoto, Mamoru |
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Zdroj: | In Journal of Crystal Growth 1 February 2023 603 |
Databáze: | ScienceDirect |
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