Effects of different partition depths on heat and oxygen transport during continuous Czochralski (CCz) silicon crystal growth
| Autor: | Nguyen, Thi-Hoai-Thu, Chen, Jyh-Chen, Lo, Shih-Chi |
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| Zdroj: | In Journal of Crystal Growth 1 April 2022 583 |
| Databáze: | ScienceDirect |
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