Reduction of threading dislocation densities of N-polar face-to-face annealed sputtered AlN on sapphire
| Autor: | Shojiki, Kanako, Uesugi, Kenjiro, Kuboya, Shigeyuki, Miyake, Hideto |
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| Zdroj: | In Journal of Crystal Growth 15 November 2021 574 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect