Study of silicon nitride deposition in III-N MOVPE reactors
| Autor: | Lundin, W.V., Rodin, S.N., Zavarin, E.E., Sakharov, A.V., Zakheim, D.A., Nikolaev, A.E., Tsatsulnikov, A.F. |
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| Zdroj: | In Journal of Crystal Growth 1 December 2020 551 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect