Influence of the growth interface shape on the defect characteristics in the facet region of 4H-SiC single crystals
Autor: | Arzig, Matthias, Salamon, Michael, Hsiao, Ta Ching, Uhlmann, Norman, Wellmann, Peter J. |
---|---|
Zdroj: | In Journal of Crystal Growth 15 February 2020 532 |
Databáze: | ScienceDirect |
Externí odkaz: |