Metalorganic chemical vapor deposition of aluminum nitride on vertical surfaces
| Autor: | Österlund, Elmeri, Suihkonen, Sami, Ross, Glenn, Torkkeli, Altti, Kuisma, Heikki, Paulasto-Kröckel, Mervi |
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| Zdroj: | In Journal of Crystal Growth 1 February 2020 531 |
| Databáze: | ScienceDirect |
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