Ammonia decomposition and reaction by high-resolution mass spectrometry for group III – Nitride epitaxial growth
| Autor: | Ye, Zheng, Nitta, Shugo, Nagamatsu, Kentaro, Fujimoto, Naoki, Kushimoto, Maki, Deki, Manato, Tanaka, Atsushi, Honda, Yoshio, Pristovsek, Markus, Amano, Hiroshi |
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| Zdroj: | In Journal of Crystal Growth 15 June 2019 516:63-66 |
| Databáze: | ScienceDirect |
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