Stabilization of sputtered AlN/sapphire templates during high temperature annealing
| Autor: | Hagedorn, S., Walde, S., Mogilatenko, A., Weyers, M., Cancellara, L., Albrecht, M., Jaeger, D. |
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| Zdroj: | In Journal of Crystal Growth 15 April 2019 512:142-146 |
| Databáze: | ScienceDirect |
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