Heteroepitaxial growth of α-, β-, γ- and κ-Ga2O3 phases by metalorganic vapor phase epitaxy
Autor: | Gottschalch, Volker, Merker, Stefan, Blaurock, Steffen, Kneiß, Max, Teschner, Ulrike, Grundmann, Marius, Krautscheid, Harald |
---|---|
Zdroj: | In Journal of Crystal Growth 15 March 2019 510:76-84 |
Databáze: | ScienceDirect |
Externí odkaz: |