Growth temperatures and the excess chlorine effect of N-Polar GaN growth via tri-halide vapor phase epitaxy

Autor: Takekawa, Nao, Hayashida, Naoto, Ohzeki, Daisuke, Yamaguchi, Akira, Murakami, Hisashi, Kumagai, Yoshinao, Matsumoto, Koh, Koukitu, Akinori
Zdroj: In Journal of Crystal Growth 15 November 2018 502:7-13
Databáze: ScienceDirect