Identification of higher order silanes during monosilane pyrolysis using gas chromatography-mass spectrometry
| Autor: | Wyller, Guro Marie, Preston, Thomas J., Klette, Hallgeir, Mongstad, Trygve, Marstein, Erik Stensrud |
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| Zdroj: | In Journal of Crystal Growth 15 September 2018 498:315-327 |
| Databáze: | ScienceDirect |
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