Induction-heating MOCVD reactor with significantly improved heating efficiency and reduced harmful magnetic coupling

Autor: Li, Kuang-Hui, Alotaibi, Hamad S., Sun, Haiding, Lin, Ronghui, Guo, Wenzhe, Torres-Castanedo, Carlos G., Liu, Kaikai, Valdes-Galán, Sergio, Li, Xiaohang
Zdroj: In Journal of Crystal Growth 15 April 2018 488:16-22
Databáze: ScienceDirect