Low threading dislocation density aluminum nitride on silicon carbide through the use of reduced temperature interlayers
| Autor: | Foronda, Humberto M., Wu, Feng, Zollner, Christian, Alif, Muhammad Esmed, Saifaddin, Burhan, Almogbel, Abdullah, Iza, Michael, Nakamura, Shuji, DenBaars, Steven P., Speck, James S. |
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| Zdroj: | In Journal of Crystal Growth 1 February 2018 483:134-139 |
| Databáze: | ScienceDirect |
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