Formation of basal plane stacking faults on the ([formula omitted]) facet of heavily nitrogen-doped 4H-SiC single crystals during physical vapor transport growth

Autor: Ohtomo, Kohei, Matsumoto, Nana, Ashida, Koji, Kaneko, Tadaaki, Ohtani, Noboru, Katsuno, Masakazu, Sato, Shinya, Tsuge, Hiroshi, Fujimoto, Tatsuo
Zdroj: In Journal of Crystal Growth 15 November 2017 478:174-179
Databáze: ScienceDirect