Orientation-controlled epitaxial lateral overgrowth of semipolar GaN on Si(001) with a directionally sputtered AlN buffer layer
| Autor: | Lee, Ho-Jun, Bae, Si-Young, Lekhal, Kaddour, Tamura, Akira, Suzuki, Takafumi, Kushimoto, Maki, Honda, Yoshio, Amano, Hiroshi |
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| Zdroj: | In Journal of Crystal Growth 15 June 2017 468:547-551 |
| Databáze: | ScienceDirect |
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