Features of SOI substrates heating in MBE growth process obtained by low-coherence tandem interferometry
| Autor: | Volkov, P.V., Goryunov, А.V., Lobanov, D.N., Luk'yanov, А.Yu., Novikov, А.V., Tertyshnik, А.D., Shaleev, М.V., Yurasov, D.V. |
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| Zdroj: | In Journal of Crystal Growth 15 August 2016 448:89-92 |
| Databáze: | ScienceDirect |
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