Kinetics and thermodynamics of Si(111) surface nitridation in ammonia
| Autor: | Mansurov, Vladimir G., Malin, Timur V., Galitsyn, Yurij G., Shklyaev, Alexander A., Zhuravlev, Konstantin S. |
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| Zdroj: | In Journal of Crystal Growth 1 May 2016 441:12-17 |
| Databáze: | ScienceDirect |
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