CBr4-based in-situ etching of GaAs, assisted with TMAl and TMGa
| Autor: | Della Casa, Pietro, Maaßdorf, Andre, Zeimer, Ute, Weyers, Markus |
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| Zdroj: | In Journal of Crystal Growth 15 January 2016 434:116-122 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Della Casa, Pietro, Maaßdorf, Andre, Zeimer, Ute, Weyers, Markus |
|---|---|
| Zdroj: | In Journal of Crystal Growth 15 January 2016 434:116-122 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect