On the shape of n-type Czochralski silicon top ingots

Autor: Gaspar, Guilherme, Juel, Mari, Søndenå, Rune, Pascoa, Soraia, Di Sabatino, Marisa, Arnberg, Lars, Øvrelid, Eivind J.
Zdroj: In Journal of Crystal Growth 15 May 2015 418:176-184
Databáze: ScienceDirect