Chemical vapor deposition of Pd/Cu alloy films from a new single source precursor
| Autor: | Krisyuk, Vladislav V., Shubin, Yuriy V., Senocq, François, Turgambaeva, Asiya E., Duguet, Thomas, Igumenov, Igor K., Vahlas, Constantin |
|---|---|
| Zdroj: | In Journal of Crystal Growth 15 March 2015 414:130-134 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect