Highly uniform growth of 2-inch GaN wafers with a multi-wafer HVPE system
| Autor: | Liu, Nanliu, Wu, Jiejun, Li, Wenhui, Luo, Ruihong, Tong, Yuzhen, Zhang, Guoyi |
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| Zdroj: | In Journal of Crystal Growth 15 February 2014 388:132-136 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect