Large thickness-dependent improvement of crystallographic texture of CVD silicon films on R-sapphire
| Autor: | Moyzykh, M., Samoilenkov, S., Amelichev, V., Vasiliev, A., Kaul, A. |
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| Zdroj: | In Journal of Crystal Growth 15 November 2013 383:145-150 |
| Databáze: | ScienceDirect |
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