On mechanisms governing AlN and AlGaN growth rate and composition in large substrate size planetary MOVPE reactors
| Autor: | Dauelsberg, Martin, Brien, Daniel, Rauf, Hendrik, Reiher, Fabian, Baumgartl, Johannes, Häberlen, Oliver, Segal, Alexander S., Lobanova, Anna V., Yakovlev, Eugene V., Talalaev, Roman A. |
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| Zdroj: | In Journal of Crystal Growth 1 May 2014 393:103-107 |
| Databáze: | ScienceDirect |
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