Vapor–liquid–solid growth of thick 2H–SiC layers under CH4 continuous flow
| Autor: | Nakagawa, Yusuke, Takeuchi, Shin, Ishikawa, Akito, Imade, Mamoru, Yoshimura, Masashi, Mori, Yusuke |
|---|---|
| Zdroj: | In Journal of Crystal Growth 15 May 2013 371:23-27 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect