Formation of V-grooves on the (Al,Ga)N surface as means of tensile stress relaxation

Autor: Cheng, Kai a, Leys, M. a, ⁎, Degroote, S. b, 1, Bender, H. a, Favia, P. a, Borghs, G. a, Germain, M. b, 1
Zdroj: In Journal of Crystal Growth 15 August 2012 353(1):88-94
Databáze: ScienceDirect