Multicycle rapid thermal annealing technique and its application for the electrical activation of Mg implanted in GaN
| Autor: | Feigelson, B.N., Anderson, T.J., Abraham, M., Freitas, J.A., Hite, J.K., Eddy, C.R., Kub, F.J. |
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| Zdroj: | In Journal of Crystal Growth 1 July 2012 350(1):21-26 |
| Databáze: | ScienceDirect |
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