In situ curvature monitoring for metal–organic vapor phase epitaxy of strain-balanced stacks of InGaAs/GaAsP multiple quantum wells
Autor: | Sugiyama, Masakazu, Sugita, Kenichi, Wang, Yunpeng, Nakano, Yoshiaki |
---|---|
Zdroj: | In Journal of Crystal Growth 2011 315(1):1-4 |
Databáze: | ScienceDirect |
Externí odkaz: |