In situ curvature monitoring for metal–organic vapor phase epitaxy of strain-balanced stacks of InGaAs/GaAsP multiple quantum wells

Autor: Sugiyama, Masakazu, Sugita, Kenichi, Wang, Yunpeng, Nakano, Yoshiaki
Zdroj: In Journal of Crystal Growth 2011 315(1):1-4
Databáze: ScienceDirect