Ordered arrays of epitaxial silicon nanowires produced by nanosphere lithography and chemical vapor deposition
Autor: | Lerose, Damiana, Bechelany, Mikhael, Philippe, Laetitia, Michler, Johann, Christiansen, Silke |
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Zdroj: | In Journal of Crystal Growth 2010 312(20):2887-2891 |
Databáze: | ScienceDirect |
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