Ordered arrays of epitaxial silicon nanowires produced by nanosphere lithography and chemical vapor deposition

Autor: Lerose, Damiana, Bechelany, Mikhael, Philippe, Laetitia, Michler, Johann, Christiansen, Silke
Zdroj: In Journal of Crystal Growth 2010 312(20):2887-2891
Databáze: ScienceDirect