Acceptor incorporation in SiC epilayers grown at high growth rate with chloride-based CVD
| Autor: | Pedersen, H., Beyer, F.C., Henry, A., Janzén, E. |
|---|---|
| Zdroj: | In Journal of Crystal Growth 2009 311(13):3364-3370 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Pedersen, H., Beyer, F.C., Henry, A., Janzén, E. |
|---|---|
| Zdroj: | In Journal of Crystal Growth 2009 311(13):3364-3370 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect