Crystallographic properties of grain size-controlled polycrystalline silicon thin films deposited on alumina substrate
| Autor: | Ogane, Akiyoshi, Honda, Shinya, Uraoka, Yukiharu, Fuyuki, Takashi, Fejfar, Antonín, Kočka, Jan |
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| Zdroj: | In Journal of Crystal Growth 2009 311(3):789-793 |
| Databáze: | ScienceDirect |
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