Quantitative analysis of in situ wafer bowing measurements for III-nitride growth on sapphire
| Autor: | Brunner, F., Knauer, A., Schenk, T., Weyers, M., Zettler, J.-T. |
|---|---|
| Zdroj: | In Journal of Crystal Growth 2008 310(10):2432-2438 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect