Structural and surface characterization of large diameter, crystalline AlN substrates for device fabrication

Autor:	Schujman, Sandra B., Schowalter, Leo J., Bondokov, Robert T., Morgan, Kenneth E., Liu, Wayne, Smart, Joseph A., Bettles, Tim
Zdroj:	In Journal of Crystal Growth 2008 310(5):887-890
Databáze:	ScienceDirect
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect