Structural and surface characterization of large diameter, crystalline AlN substrates for device fabrication
| Autor: | Schujman, Sandra B., Schowalter, Leo J., Bondokov, Robert T., Morgan, Kenneth E., Liu, Wayne, Smart, Joseph A., Bettles, Tim |
|---|---|
| Zdroj: | In Journal of Crystal Growth 2008 310(5):887-890 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect