Increased nitrogen doping of thin lateral SiC cantilevers
| Autor: | Trunek, Andrew J., Neudeck, Philip G., Matocha, Kevin, Dunne, Greg |
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| Zdroj: | In Journal of Crystal Growth 2008 310(7):1794-1798 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Trunek, Andrew J., Neudeck, Philip G., Matocha, Kevin, Dunne, Greg |
|---|---|
| Zdroj: | In Journal of Crystal Growth 2008 310(7):1794-1798 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect