Epitaxial growth of Ge on a thin SiO 2 layer by ultrahigh vacuum chemical vapor deposition

Autor: Halbwax, M., Renard, C., Cammilleri, D., Yam, V., Fossard, F., Bouchier, D., Zheng, Y., Rzepka, E.
Zdroj: In Journal of Crystal Growth 2007 308(1):26-29
Databáze: ScienceDirect