Metalorganic chemical vapor deposition of InGaAsN using dilute nitrogen trifluoride
| Autor: | Cheng, S.F., Woo, R.L., Noori, A.M., Malouf, G., Goorsky, M.S., Hicks, R.F. |
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| Zdroj: | In Journal of Crystal Growth 2007 299(2):277-281 |
| Databáze: | ScienceDirect |
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