Modeling and process design of III-nitride MOVPE at near-atmospheric pressure in close coupled showerhead and planetary reactors
| Autor: | Dauelsberg, M., Martin, C., Protzmann, H., Boyd, A.R., Thrush, E.J., Käppeler, J., Heuken, M., Talalaev, R.A., Yakovlev, E.V., Kondratyev, A.V. |
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| Zdroj: | In Journal of Crystal Growth 2007 298:418-424 |
| Databáze: | ScienceDirect |
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