High-temperature growth of very high germanium content SiGe virtual substrates
Autor: | Bogumilowicz, Y., Hartmann, J.M., Di Nardo, C., Holliger, P., Papon, A.-M., Rolland, G., Billon, T. |
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Zdroj: | In Journal of Crystal Growth 2006 290(2):523-531 |
Databáze: | ScienceDirect |
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