High-temperature growth of very high germanium content SiGe virtual substrates

Autor: Bogumilowicz, Y., Hartmann, J.M., Di Nardo, C., Holliger, P., Papon, A.-M., Rolland, G., Billon, T.
Zdroj: In Journal of Crystal Growth 2006 290(2):523-531
Databáze: ScienceDirect