Passivation of Si(0 0 1) by the surfactant Sb and its influence on the NiSi 2 growth

Autor: Mogilatenko, Anna, Falke, Meiken, Hortenbach, Heiko, Teichert, Steffen, Beddies, Gunter, Hinneberg, Hans-Jürgen
Zdroj: In Journal of Crystal Growth 2005 283(3):303-308
Databáze: ScienceDirect