Surface preparation of [formula omitted]-SiC for the epitaxial growth of 3C–SiC

Autor: Soueidan, M. *, Ferro, G., Dazord, J., Monteil, Y., Younes, G.
Zdroj: In Journal of Crystal Growth 2005 275(1):e1011-e1016
Databáze: ScienceDirect