Volatile CVD precursor for Ni film: cyclopentadienylallylnickel
| Autor: | Kada, T. *, Ishikawa, M., Machida, H., Ogura, A., Ohshita, Y., Soai, K. |
|---|---|
| Zdroj: | In Journal of Crystal Growth 2005 275(1):e1115-e1119 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
| Autor: | Kada, T. *, Ishikawa, M., Machida, H., Ogura, A., Ohshita, Y., Soai, K. |
|---|---|
| Zdroj: | In Journal of Crystal Growth 2005 275(1):e1115-e1119 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect