Chemical kinetics and design of gas inlets for III–V growth by MOVPE in a quartz showerhead reactor
| Autor: | Li, Zhi-qiang *, Zhou, Vivian, Li, Simon, Sudersena Rao, T., Jiang, W.Y., Watkins, S.P. |
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| Zdroj: | In Journal of Crystal Growth 2004 272(1):47-51 |
| Databáze: | ScienceDirect |
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