Prediction of the growth interface shape in industrial 300 mm CZ Si crystal growth
Autor: | Wetzel, Th. *, Virbulis, J., Muiznieks, A., von Ammon, W., Tomzig, E., Raming, G., Weber, M. |
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Zdroj: | In Journal of Crystal Growth 2004 266(1):34-39 |
Databáze: | ScienceDirect |
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