Growth of AlGaN epilayers related gas-phase reactions using TPIS-MOCVD

Autor: Kim, Sunwoon *, Seo, Junho, Lee, Kyuhan, Lee, Haeseok, Park, Keunseop, Kim, Younghoon, Kim, Chang-Soo
Zdroj: In Journal of Crystal Growth 2002 245(3):247-253
Databáze: ScienceDirect